Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations-Reference-Cited by-同舟云学术

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Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations

Published:2018-12 Issue: Volume:160 Page:338-349
ISSN:0264-1275
Container-title:Materials & Design
language:en
Short-container-title:Materials & Design

Author:

Bouaouina Boudjemaa,Mastail Cédric,Besnard Aurélien,Mareus Rubenson,Nita Florin,Michel Anny,Abadias Grégory

Funder

ANR

Ministry of Higher Education and Scientific Research

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference52 articles.

1. Glancing angle deposition: fabrication, properties, and applications of micro- and nanostructured thin films;Hawkeye;J. Vac. Sci. Technol. A,2007

2. Perspectives on oblique angle deposition of thin films: from fundamentals to devices;Barranco;Prog. Mater. Sci.,2016

3. Silicon nanosprings fabricated by glancing angle deposition for ultra-compliant films and interfaces;Antartis;Mater. Des.,2018

4. Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: a joint experimental and modeling study;Dervaux;Thin Solid Films,2017

5. Morphology and crystal texture in tilted columnar micro-structured titanium thin film coatings;Sadeghi-Khosravieh;Thin Solid Films,2017

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