Reverse bias dependent impedance and dielectric properties of Al/n-NC FeSi2/p-Si/Pd heterostructures formed by facing-targets sputtering-Reference-Cited by-同舟云学术

Reverse bias dependent impedance and dielectric properties of Al/n-NC FeSi2/p-Si/Pd heterostructures formed by facing-targets sputtering

Published:2022-08 Issue: Volume:146 Page:106641
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Borwornpornmetee Nattakorn^ORCID,Chaleawpong Rawiwan,Charoenyuenyao Peerasil,Nopparuchikun Adison,Paosawatyanyong Boonchoat,Sittimart Phongsaphak,Yoshitake Tsuyoshi,Promros Nathaporn^ORCID

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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