Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference43 articles.
1. Compositional study of ultrathin rapidly reoxidized nitrided oxides;Hori;J. Appl. Phys.,1989
2. Tunneling leakage current in oxynitride: dependence on oxygen/nitrogen content;Guo;IEEE Electron. Device Lett.,1998
3. CIS module pilot processing applying concurrent rapid selenization and sulfurization of large area thin film precursors;Palm,2003
4. High resolution ion scattering study of silicon oxynitridation;Lu;Appl. Phys. Lett.,1996
5. Boron Diffusion in Silicon Oxides and Oxynitrides;Ellis,1998
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献