Effects of contactless photoelectrochemical reaction on repair of etching damage in GaN SBD
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Published:2024-11
Issue:
Volume:183
Page:108756
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Li XinORCID,
Liang Zhiwen,
Wang Fengge,
Xu Yanyan,
Liu Zenghui,
Liang Yisheng,
Lin Lizhang,
Zhang Baijun