Effects of oxygen concentration on the properties of Al-doped ZnO transparent conductive films deposited by pulsed DC magnetron sputtering-Reference-Cited by-同舟云学术

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Effects of oxygen concentration on the properties of Al-doped ZnO transparent conductive films deposited by pulsed DC magnetron sputtering

Published:2013-06 Issue:3 Volume:16 Page:997-1001
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Kim Doo-Soo,Park Ji-Hyeon,Lee Su-Jeong,Ahn Kyung-Jun,Lee Mi-So,Ham Moon-Ho,Lee Woong,Myoung Jae-Min

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference29 articles.

1. Radio frequency sputter deposition of high-quality conductive and transparent ZnO:Al films on polymer substrates for thin film solar cells applications

2. Raman scattering in ZnO thin films doped with Fe, Sb, Al, Ga, and Li

3. Hydrogen doping of DC sputtered ZnO:Al films from novel target material

4. Characteristics of ZnO thin films prepared by radio frequency magnetron sputtering

5. Characterization of ZnO films prepared by dc reactive magnetron sputtering at different oxygen partial pressures

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1. The Impact of Temperature and Power Variation on the Optical, Wettability, and Anti-Icing Characteristics of AZO Coatings;Crystals;2024-04-15

2. Improving the electrical properties of transparent ZnO-based thin- film transistors using MgO gate dielectric with various oxygen concentrations;Nanotechnology;2023-11-10

3. Effects of oxygen contents on the physical properties of MgO films and carrier transport of Au/MgO/ZnO MIS diodes;Ceramics International;2023-09

4. Optoelectrical properties extraction using spectroscopic ellipsometry, in case of AZO thin films deposited by DC reactive sputtering in various oxygen concentration;Journal of Materials Science: Materials in Electronics;2023-06

5. Performance of Si-based solar cell utilizing optimized Al-doped ZnO films as TCO layer;Journal of Materials Science: Materials in Electronics;2023-01

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