Author:
Lee KyungWon,Ameen Michael Saied,Rubin Leonard Michael,Roh Dwight Dongwan,Hong Rimpyo,Reece Ronald Norman,Yoon DaeHo
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference16 articles.
1. Ion implantation in semiconductors;Mayer,1973
2. Formation of amorphous silicon by ion bombardment as a function of ion, temperature, and dose;Morehead;J. Appl. Phys.,1972
3. Modelling and Simulation of Ion Implantation Induced Damage;Mok Kai,2007
4. Ion implantation in semiconductors - Part II: damage production and annealing;Gibbons;Proc. IEEE,1972
5. NMOS source-drain extension ion implantation into heated substrates;Pipes,2014
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献