Effect of post-deposition annealing on atomic layer deposited SiO2 film for silicon surface passivation-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Effect of post-deposition annealing on atomic layer deposited SiO2 film for silicon surface passivation

Published:2020-02 Issue: Volume:106 Page:104777
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Li Shizheng,Xu Jiahui,Wang Liangxing,Yang Ning,Ye Xiaojun,Yuan Xiao,Xiang Haitao,Liu Cui,Li Hongbo

Funder

Shanghai Municipal Project

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference42 articles.

1. Advances in the surface passivation of silicon solar cells;Schmidt;Energy Procedia,2012

2. Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells;Dingemans;J. Vac. Sci. Technol. A,2012

3. a-SiOx:H passivation layers for Cz-Si wafer deposited by hot wire chemical vapor deposition;He;Mater. Sci. Semicond. Process.,2017

4. Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks;Pasanen;Energy Procedia,2017

5. Surface passivation of crystalline silicon solar cells: A review;Aberle;Prog. Photovolt. Res. Appl.,2000

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Regulating the valence state of lead ions in lead aluminosilicate glass to improve the passivation performance for advanced chip packaging;Applied Surface Science;2024-04

2. Optimization of a Solution-Processed TiO_x/(n)c-Si Electron-Selective Interface by Pre- and Postdeposition Treatments;ACS Applied Materials & Interfaces;2024-03-19

3. Effects of the thermal treatments on the optical properties of SiO2 anti-reflective coatings on sapphire windows;Infrared Physics & Technology;2024-03

4. Femtosecond laser strengthening of electron-beam deposited SiO2 thin film on fused silica substrates;Thin Solid Films;2023-09

5. Strained BaTiO3 thin films via in-situ crystallization using atomic layer deposition on SrTiO3 substrate;Materials Science in Semiconductor Processing;2023-06

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3