Optical and crystallographic analysis of thin films of GeC deposited using a unique hollow cathode sputtering technique-Reference-Cited by-同舟云学术

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Optical and crystallographic analysis of thin films of GeC deposited using a unique hollow cathode sputtering technique

Published:2006-08 Issue:4-5 Volume:9 Page:759-763
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Huguenin-Love J.L.,Soukup R.J.,Ianno N.J.,Schrader J.S.,Thompson D.W.,Dalal V.L.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference14 articles.

1. The physics of solar cells;Nelson,2003

2. Polycrystalline GeC Thin Films Deposited Using a Unique Hollow Cathode Sputtering Technique

3. Thin films of GeC deposited using a unique hollow cathode sputtering technique

4. Deposition of electronic quality amorphous silicon,a-Si:H, thin films by a hollow cathode plasma-jet reactive sputtering system

5. Investigation of the rf and dc hollow cathode plasma-jet sputtering systems for the deposition of silicon thin films

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1. Simulations of Infrared Reflectivity and Transmission Phonon Spectra for Undoped and Doped GeC/Si (001);Nanomaterials;2024-09-03

2. Polymorphism of group-IV carbides: Structures, (meta)stability, electronic, and transport properties;Physical Review Materials;2023-05-12

3. Microstructure and phase evolution of ceramic layers on Ta-2.5W alloy;International Journal of Refractory Metals and Hard Materials;2018-09

4. Effects of hydrogen incorporation on structural, optical and electrical properties of germanium carbon films prepared with RF magnetron co-sputtering;Journal of Alloys and Compounds;2017-02

5. Effect of substrate temperature and radio frequency power on compositional, structural and optical properties of amorphous germanium carbide films deposited using sputtering;Journal of Non-Crystalline Solids;2016-07

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