Impact on the subsurface layers of the single-crystal β-Ga2O3 wafers induced by a mechanical wear

Author:

Butenko P.N.,Guzilova L.I.,Chikiryaka A.V.,Boiko M.E.,Sharkov M.D.,Almaev A.V.,Nikolaev V.I.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference22 articles.

1. Gallium oxide: properties and applications - a review;Stepanov;Rev. Adv. Mater. Sci.,2015

2. Bulk crystal growth of Ga2O3;Kuramata,2018

3. A review of Ga2O3 materials, processing, and devices;Pearton;Appl. Phys. Rev.,2018

4. Gallium oxide-based solar-blind ultraviolet photodetectors;Chen;Semicond. Sci. Technol.,2020

5. Effect of post-annealing on the properties of Co-doped ZnO thin films deposited by channel-spark ablation;Ali;Mater. Sci. Semicond. Process.,2018

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