Modeling of glancing incidence X-ray for depth profiling of thin layers

Author:

Colombi Paolo,Zanola Paolo,Bontempi Elza,Depero Laura E.

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference10 articles.

1. X-ray reflectivity for the characterisation of thin films;Bontempi,2004

2. Depth profile characterization of electrodeposited multi-thin-film structures by low angle of incidence X-ray diffractometry;Nauer;Thin Solid Films,2005

3. In situ grazing incidence X-ray diffraction study of strain evolution during growth and postgrowth annealing of MnAs on GaAs (113)A;Satapathy;J. Phys., D. Appl. Phys.,2005

4. Surface-sensitive X-ray fluorescence and diffraction analysis with grazing—exit geometry;Noma;X-ray Spectrom.,1999

5. Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications;Attwood,1999

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