Dielectric and semiconducting Ge-C and Si-C thin films prepared by plasma deposition from organic compounds
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference5 articles.
1. Electronic structure of plasma-deposited amorphous Si-C alloy films
2. Band structure model of Ge-C alloy films prepared from tetraethylgermanium in A R.F. discharge
3. Electronic properties of plasma-deposited films prepared from tetramethylsilane
4. Electronic properties of microcrystalline silicon prepared in the glow discharge plasma
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