Transmission electron microscopy characterization of hard coatings and films: sample preparation aspects and results
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference19 articles.
1. Topographical changes induced by low energy ion beam sputtering at oblique incidence
2. Suppression of surface topography development in ion-milling of semiconductors
3. SEM and TEM observations of first and second order sputter-induced topography
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