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MEMS Testing

Published:2008 Issue: Volume: Page:591-651
ISSN:
Container-title:System-on-Chip Test Architectures
language:
Short-container-title:

Author:

Ramadoss Ramesh,Dean Robert,Xiong Xingguo

Publisher

Elsevier

Reference82 articles.

1. Volume 8: Micro mechanical transducers, pressure sensors, accelerometers and gyroscopes;Bao,2000

2. Introduction to Microelectromechanical Microwave Systems;Los Santos,1999

3. Elements of Vibration Analysis;Meirovitch,1986

4. MOEMS: Micro-Opto-Electro-Mechanical Systems,2005

5. RF MEMS: Theory, Design, and Technology;Rebeiz,2002

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dry Test Methods for Micropumps;Applied Sciences;2022-11-30

2. Silicon carbide membranes for micro-electro-mechanical-systems based CMUT with influence factors;MATER PHYS MECH;2022

3. MEMS for detection of environmental pollutants: A review pertains to sensors over a couple of decades in 21st century;Materials Today: Proceedings;2021

4. A Review on Key Issues and Challenges in Devices Level MEMS Testing;Journal of Sensors;2016

5. A Parallel Tester Architecture for Accelerometer and Gyroscope MEMS Calibration and Test;Journal of Electronic Testing;2011-03-11

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