MEMS based hydrogen sensing with parts-per-billion resolution

Author:

Gurusamy J.T.,Putrino Gino,Jeffery Roger D.,Silva K.K.M.B. Dilusha,Martyniuk Mariusz,Keating Adrian,Faraone Lorenzo

Funder

Australian Research Council and Panorama Synergy

Western Australian Node of the Australian National Fabrication Facility

Office of Science of WA State Government

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference34 articles.

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2. Hydrogen sensors – A review,”;Hübert;Sens. Actuators B Chem.,2011

3. Electrode kinetics of amperometric hydrogen sensors for hydrogen detection at low parts per million level;Sakthivel;J. Solid State Electrochem.,2007

4. Sensing properties of Pt/Pd activated tungsten oxide films grown by simultaneous radio-frequency sputtering to reducing gases;Zhang;Sens. Actuators B Chem.,2012

5. IEEE Guide for the Interpretation of Gases Generated in Oil-Immersed Transformers,2009

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