Wurtzite Al1xGaxPyN1y barrier layer growth for high electron mobility transistors

Author:

Pristovsek MarkusORCID

Funder

Japan Society for the Promotion of Science

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference32 articles.

1. Low-sheet-resistance high-electron-mobility transistor structures with strain-controlled high-Al-composition AlGaN barrier grown by MOVPE;Yamada;J. Cryst. Growth,2021

2. Unintentional Ga incorporation in metalorganic vapor phase epitaxy of In-containing III-nitride semiconductors;Hiroki;J. Cryst. Growth,2013

3. D. Wu, Z. Ye, S. Nitta, Y. Honda, M. Pristovsek, H. Amano, Analysis of transmetalation between tmi and metallic ga during alinn growth by high-resolution mass spectrometry, in: 67th JSAP Spring Meeting, 2020, http://dx.doi.org/10.11470/jsapmeeting.2020.1.0_3044.

4. Growth by MOCVD of In(Ga)AlN alloys, and a study of gallium contamination in these layers under nitrogen and hydrogen carrier gas;Bouveyron;J. Cryst. Growth,2017

5. Solving the problem of gallium contamination problem in InAlN layers in close coupled showerhead reactors;Mrad;Appl. Phys. Express,2019

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