Nature of the parasitic chemistry during AlGaInN OMVPE
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference43 articles.
1. OMVPE growth and gas-phase reactions of AlGaN for UV emitters
2. A study of parasitic reactions between NH3 and TMGa or TMAI
3. The influence of TMA and SiH4 on the incorporation rate of Ga in AlxGa1−xN crystals grown from TMG and NH3
4. AlN and AlGaN growth using low-pressure metalorganic chemical vapor deposition
5. GaN Growth by Metallorganic Vapor Phase Epitaxy: A Comparison of Modeling and Experimental Measurements
Cited by 134 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Improved surface morphology and reduced V-pits density of lattice-matched AlInN films grown by atmospheric pressure metalorganic chemical vapor deposition;Journal of Alloys and Compounds;2024-12
2. Numerical simulation study on growth rate and gas reaction path of InN-MOCVD with Close-Coupled showerhead reactor;Journal of Crystal Growth;2024-07
3. Nitrogen-polar growth of AlN on vicinal (0001) sapphire by MOVPE;Journal of Applied Physics;2024-05-17
4. Nucleation mechanism of gas-phase InGaN nanoparticles;Journal of Crystal Growth;2024-03
5. A CFD study of the gas reaction path in growth of InN films in metal–organic chemical vapor deposition;Journal of Crystal Growth;2024-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3