Atomistic examinations of the solid-phase epitaxial growth of silicon
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference31 articles.
1. Growth Techniques and Procedures
2. Kinetics of solid phase crystallization in amorphous silicon
3. The role of defects during amorphization and crystallization processes in ion implanted Si
4. Ion-beam-induced epitaxial crystallization and amorphization in silicon
5. Mass effects on regrowth rates and activation energies of solid-phase epitaxy induced by ion beams in silicon
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4. Formation technology of flat surface with epitaxial growth on ion-implanted (100)-oriented Si surface of thin silicon-on-insulator;Japanese Journal of Applied Physics;2017-09-19
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