Surface Modification of Materials by Plasma Immersion Ion Implantation
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Publisher
Elsevier
Reference91 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Plasma source ion implantation: A new approach to ion beam modification of materials
3. Instrumental and process considerations for the fabrication of silicon-on-insulators (SOI) structures by plasma immersion ion implantation
4. Plasma source ion‐implantation technique for surface modification of materials
5. Sheath thickness and potential profiles of ion‐matrix sheaths for cylindrical and spherical electrodes
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