Control of hydrogen concentration on InGaZnO thin film using cryopumping system
Author:
Funder
Samsung Display
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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1. Thermal Dehydrogenation Impact on Positive Bias Stability of Amorphous InSnZnO Thin-Film Transistors;ACS Applied Materials & Interfaces;2024-07-16
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