Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputtering-Reference-Cited by-同舟云学术

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Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputtering

Published:2014-11 Issue: Volume:109 Page:43-51
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Arab Pour Yazdi M.,Lomello F.,Wang J.,Sanchette F.,Dong Z.,White T.,Wouters Y.,Schuster F.,Billard A.

Funder

CEA Cross-Cutting program on Advanced Materials

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference41 articles.

1. A concept for the design of novel superhard coatings

2. Mechanical and tribological properties of nanocomposite TiSiN coatings

3. Superhard nanocrystalline composite materials: The TiN/Si3N4 system

4. Effects of Si content and free Si on oxidation behavior of Ti–Si–N coating layers

5. Deposition of nanocomposite TiN-Si3N4 thin films by hybrid cathodic arc and chemical vapor process

Cited by 54 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tribological properties under dry and lubricated sliding conditions of TiSiN and AlTiCrN coatings deposited on gray cast iron;Surfaces and Interfaces;2024-09

2. Effect of the TiSiN interlayer properties on the adhesion and mechanical properties of multilayered TiSiCN thin films;Surface and Coatings Technology;2024-02

3. Indentation and sliding contact testing of three laser-textured and PVD-coated cemented carbide tools;Surface and Coatings Technology;2023-11

4. The effect of Si content on microstructure and mechanical properties of Ti–Al–Ta–Si–N coatings;Vacuum;2023-10

5. Thermodynamic reassessments of the Ti–Si–C/Ti–Si–N systems and thermodynamic calculations of CVD TiSiCN hard-coating based on the Ti–Si–C–N quaternary system;Calphad;2023-09

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