Structural and optical properties of Si hyperdoped with Te by ion implantation and pulsed laser annealing-Reference-Cited by-同舟云学术

Structural and optical properties of Si hyperdoped with Te by ion implantation and pulsed laser annealing

Published:2020-08 Issue: Volume:178 Page:109434
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Komarov Fadei F.,Nechaev Nikita S.,Ivlev Gennadii D.,Vlasukova Liudmila A.,Parkhomenko Irina N.,Wendler Elke,Romanov Ivan A.,Berencén Yonder,Pilko Vladimir V.,Zhigulin Dmitrii V.,Komarov Alexander F.

Funder

Ministry of Education and Science of the Russian Federation

NUST

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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