Deposition and characterization of MAX-phase containing Ti–Si–C thin films by sputtering using elemental targets
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference23 articles.
1. Ti3SiC2 formed in annealed Al/Ti contacts to p-type SiC
2. Photoemission studies ofTi3SiC2and nanocrystalline-TiC/amorphous-SiC nanocomposite thin films
3. Thermal stability of Ti3SiC2 thin films
4. The MAX Phases: Unique New Carbide and Nitride Materials
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2. Tribo-oxide Competition and Oxide Layer Formation of Ti3SiC2/CaF2 Self-Lubricating Composites during the Friction Process in a Wide Temperature Range;Materials;2021-12-06
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4. Fabrication and Mechanical Properties of Cr2AlC MAX Phase Coatings on TiBw/Ti6Al4V Composite Prepared by HiPIMS;Materials;2021-02-09
5. Fabrication and characterization of micro-laminated TiC Ti5Si3Ti3SiC2 composite coatings by atmosphere plasma spraying;Vacuum;2019-03
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