High speed micro-fabrication using inductively coupled plasma ion source based focused ion beam system-Reference-Cited by-同舟云学术

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High speed micro-fabrication using inductively coupled plasma ion source based focused ion beam system

Published:2015-01 Issue: Volume:111 Page:166-169
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Menon Ranjini,Nabhiraj P.Y.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference20 articles.

1. Microfabrication by ion milling: the lathe technique;Vasile;J Vac Sci Technol B,1994

2. Microfabrication techniques using focused ion beams and emergent applications;Vasile;Micron,1999

3. Micromilling of metal alloys with focused ion beam – fabricated tools;Adams;Precis Eng J Int Soc Precis Eng Nanotechnol,2001

4. Focused ion beam microscopy and micromachining;Volkert;MRS Bull,2007

5. Low energy micron size beams from inductively coupled plasma ion source;Nabhiraj;J Vac Sci Technol B,2011

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4. On the Application of Xe+ Plasma FIB for Micro-fabrication of Small-scale Tensile Specimens;Experimental Mechanics;2019-07-24

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