Threshold and criterion for ion track etching in SiO2 layers grown on Si-Reference-Cited by-同舟云学术

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Threshold and criterion for ion track etching in SiO2 layers grown on Si

Published:2014-07 Issue: Volume:105 Page:107-110
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Vlasukova L.A.,Komarov F.F.,Yuvchenko V.N.,Wesch W.,Wendler E.,Didyk A.Yu.,Skuratov V.A.,Kislitsin S.B.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference22 articles.

1. Swift heavy ion induced modifications in structural, optical & magnetic properties of pure and V doped ZnO films

2. Effect of SHI irradiation on the morphology of SnO2 thin film prepared by reactive thermal evaporation

3. Cathodoluminescence and photoluminescence of swift ion irradiation modified zinc oxide-porous silicon nanocomposite

4. Anisotropy of Co nanoparticles induced by swift heavy ions

5. Shape deformation of embedded metal nanoparticles by swift heavy ion irradiation

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1. SYNTHESIS AND STUDY OF OPTICAL, ELECTRICAL PROPERTIES OF TIN DIOXIDE NANOWIRES IN A SiO<sub>2</sub>/Si TRACK TEMPLATE;NNC RK Bulletin;2024-06-30

2. Molecular dynamics simulation of surface phenomena due to high electronic excitation ion irradiation in amorphous silica;The European Physical Journal D;2023-02

3. Anisotropic nanostructure formation by vapor etching of ion tracks in α-quartz;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2021-07

4. Analysis of nanometer-sized aligned conical pores using small-angle x-ray scattering;Physical Review Materials;2020-05-08

5. Etched ion tracks in amorphous SiO2 characterized by small angle x-ray scattering: influence of ion energy and etching conditions;Nanotechnology;2019-04-16

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