Influence of surface smoothing on normal grain growth in Al films deposited from ionized vapor
Author:
Funder
Research Institute for Microdevices
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference16 articles.
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2. Some implications of Mullins' steady state solution for grain boundary migration in sheet material;Dunn;Acta. Metall.,1966
3. On the pinning of grain boundary motion by surface grooves;Sanchez;Scripta Metal. Mater,1992
4. Analysis of boundary motion in thin films;Brockman;Scripta Metal. Mater,1995
5. Structure evolution during processing of polycrystalline films;Thompson;Annu. Rev. Mater. Sci.,2000
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