RF PE CVD deposition of amorphous a-SixNy:H layers for application in solar cells

Author:

Jurzecka Maria,Kluska Stanisława,Jonas Stanisława,Czternastek Halina,Zakrzewska Katarzyna

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference11 articles.

1. Webber AW, Rieffe HC, Sinke WC, Soppe WJ. In: 19th European photovoltaic solar energy conference, 2004. p. 1005–8.

2. Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

3. High-rate deposition of a-SiNx:H for photovoltaic applications by the expanding thermal plasma

4. Romijn IG, Scoope WJ, Rieffe HC, Sinke WC, Weeber AW. In: 15th workshop on crystalline silicon solar cells & modules, 2005.

5. Optical properties, microstructure and composition of SixN1−x prepared at low temperatures by laser induced CVD

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