Specific features of the structure and properties of arc-PVD coatings depending on the spatial arrangement of the sample in the chamber-Reference-Cited by-同舟云学术

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Specific features of the structure and properties of arc-PVD coatings depending on the spatial arrangement of the sample in the chamber

Published:2022-06 Issue: Volume:200 Page:111047
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Grigoriev Sergey,Vereschaka Alexey^ORCID,Zelenkov Vsevolod,Sitnikov Nikolay,Bublikov Jury,Milovich Filipp,Andreev Nikolay,Mustafaev Enver

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference96 articles.

1. Components of cathode erosion in vacuum arcs;Daalder;J. Phys. Appl. Phys.,1976

2. Cathodic Arcs;Anders,2008

3. Erosion and the origin of charged and neutral species in vacuum arcs;Daalder;J. Phys. Appl. Phys.,1975

4. Vacuum-arc evaporator of metals with an extended planar cathode;Sablev;Mater. Sci. Forum,1998

5. Low-pressure arc cathode erosion;Aksenov;High Temp.,1988

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