High mobility cerium-doped indium oxide thin films prepared by reactive plasma deposition without oxygen-Reference-Cited by-同舟云学术

High mobility cerium-doped indium oxide thin films prepared by reactive plasma deposition without oxygen

Published:2022-12 Issue: Volume:206 Page:111512
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Zhang Yanping^ORCID,Gan Yu,Gan Tian,Wu Lili^ORCID,Zhang Jingquan,Hao Xia,Zhao Dewei

Funder

Sichuan Province Science and Technology Support Program

Science and Technology Department of Sichuan Province

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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