Author:
Boher Pierre,Bucchia Marc,Rey Jean Pierre,Stehle Jean Louis
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Spectroscopic ellipsometry: a new tool for “on line” quality control
2. In situ spectroscopic ellipsometry: present status and future needs for thin film characterisation and process control
3. P. Boher, J.L. Stehle, MRS Fall Meeting, December 2–6, 1996, vol. 452.
4. P. Boher, J.L. Stehle, EMRS Spring Meeting, Strasbourg, June 16–20, 1997.