High resolution lifetime scan maps of silicon wafers-Reference-Cited by-同舟云学术

High resolution lifetime scan maps of silicon wafers

Published:2000-02 Issue:1-3 Volume:71 Page:47-50
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Palais O,Gervais J,Clerc L,Martinuzzi S

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference11 articles.

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2. J.W. Orton, P. Blood, in: The Electrical Characterization of Semiconductors: Measurements of Minority Carrier Properties, Academic Press, London, 1990, pp. 71–122.

3. M. Orgeret, J. Boucher, Rev. Phys. Appl. 13 (1978) 29–37.

4. A. Schönecker, J.A. Eikelboom, A.R. Burgers, P. Lölgen, C. Leguijt, W.C. Sinke, J. Appl. Phys. 79 (1996) 1497–1504.

5. J. Schmidt, A.G. Aberle, J. Appl. Phys. 81 (1997) 6186–6199.

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