Author:
Yamashiro Tadayoshi,Kikuchi Toshifumi,Ishii Makoto,Honma Fumitaka,Sakuraba Masao,Matsuura Takashi,Murota Junichi,Tsuchiya Toshiaki
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference10 articles.
1. K. Goto, J. Murota, F. Honma, T. Matsuura, Y. Sawada, SSDM'94, 1994, p. 999.
2. J. Murota, M. Ishii, K. Goto, M. Sakuraba, T. Matsuura, Y. Kudoh, M. Koyanagi, 27th ESSDERC, 1997, p. 376.
3. Low-Temperature Epitaxial Growth ofSi/Si1-xGex/SiHeterostructure by Chemical Vapor Deposition
4. Directional etching of Si with perfect selectivity to SiO2using an ultraclean electron cyclotron resonance plasma
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