Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference61 articles.
1. Atomic Layer Epitaxy in Deposition of Various Oxide and Nitride Thin Films
2. Epitaxial metal oxide films, a leading candidate for 21st century thin film technology
3. Controlled formation of oxide materials by laser molecular beam epitaxy
4. Ceramic layer epitaxy by pulsed laser deposition in an ultrahigh vacuum system
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