Performance comparison of a single element piezoresistor with a half-active Wheatstone bridge for miniaturized pressure sensors-Reference-Cited by-同舟云学术

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Performance comparison of a single element piezoresistor with a half-active Wheatstone bridge for miniaturized pressure sensors

Published:2017-12 Issue: Volume:111 Page:340-350
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Meena K.V.,Mathew Ribu,Leelavathi Jyothi,Ravi Sankar A.

Funder

National Program on Micro and Smart Systems

VIT University

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference37 articles.

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3. A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass;Ravi Sankar;Sens. Actuat. A,2013

4. Design of a triangular platform piezoresistive affinity microcantilever sensor for biochemical sensing applications;Mathew;J. Phys. D: Appl. Phys.,2015

5. A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate;Alper;J. Microelectromech. Syst.,2005

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