Author:
Cheema Manjot Singh,Singh Pranay Kumar,Tyagi Oshin,Dvivedi Akshay,Sharma Apurbba Kumar
Funder
Department of Science and Technology
Subject
Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Evaluation of micromechanical manufacturing processes for microfluidic devices;Jáuregui;Int. J. Adv. Manuf. Technol.,2010
2. Micro ultrasonic machining and its applications in MEMS;Sun;Sensor. Actuat. A – Phys.,1996
3. X. Hu, Mechanism, Characteristics and Modeling of Micro Ultrasonic Machining, Ph.D. thesis, University of Nebraska, Lincoln, 2007.
4. A micromachining process for die-scale pattern transfer in ceramics and its application to bulk piezoelectric actuators;Li;J. Microelectromech. Syst.,2006
5. Study of 3D micro-ultrasonic machining;Yu;J. Manuf. Sci. Eng. – T. ASME,2004
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