Author:
Chiu W.J,Liang J.H,Hsu J.Y,Hsu W.S,Tzen M.S
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. High energy ion implantation
2. Megaelectronvolt implantations in silicon very-large-scale integration
3. C. McKenna, C. Russo, B. Pedersen, D. Downey, Semiconductor International, 1986, p. 101
4. Characterization of ion-beam-sputtered tungsten films on silicon
5. J.F. Ziegler, J.P. Biersack, SRIM: The Stopping and Range of Ions in Matter, Version 96.07 IBM-Research, Yorktown, 1996
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