RBS and SIMS study of the simultaneous phase growth of iridium silicides formed by RTA in vacuum-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

RBS and SIMS study of the simultaneous phase growth of iridium silicides formed by RTA in vacuum

Published:1998-03 Issue: Volume:136-138 Page:1040-1044
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Almendra A.,Serrano J.J.,Kling A.,Rodríguez T.,Blanco J.M.,da Silva M.F.,Sanz-Maudes J.,Aguilar M.,Soares J.C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference6 articles.

1. Formation of iridium silicides from Ir thin films on Si substrates

2. Comparison of the growth kinetics of titanium silicide obtained by RTA and furnace annealing

3. Growth kinetics of planar binary diffusion couples: ’’Thin‐film case’’ versus ’’bulk cases’’

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In situ X-ray diffraction study of thin film Ir/Si solid state reactions;Microelectronic Engineering;2010-03

2. Kinetics, stoichiometry, morphology, and current drive capabilities of Ir-based silicides;Journal of Applied Physics;2007-11

3. The role of the Si 3s3d states in the bonding of iridium silicides (IrSi, Ir3Si5and IrSi3);Journal of Physics: Condensed Matter;2002-03-22

4. High barrier iridium silicide Schottky contacts on Si fabricated by rapid thermal annealing;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3