Author:
Vicanek M.,Sckerl M.W.,Sigmund P.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
9 articles.
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1. In-depth distribution of ion beam damage in SiC;Vacuum;2012-01
2. Angular distribution of GaAs sputtered under oblique Cs+ bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-08
3. Modified Sigmund sputtering theory: isotopic puzzle;Radiation Effects and Defects in Solids;2005-05
4. Depth of origin of atoms sputtered from crystalline targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-06
5. Depth of origin of sputtered atoms for elemental Al and Mg targets in physical vapor deposition processes;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001-05