1. UV/Ozone cleaning for organics removal on silicon wafers;Zafonte,1984
2. Airborne molecular contamination. contamination on substrates and the environment in semiconductors and other industries;Fujimoto,2007
3. Cleaning with solvents;Durkee,2007
4. Modelling approaches for ozone processing;Valdramidis,2012
5. Oxidation of simazine: ozone, ultraviolet, and combined ozone/ultraviolet oxidation;Lai;Water Environ. Res.,1995