Chemical vapour deposition of rutile films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. preparation, properties and optical applications of thin films of titanium dioxide
2. Titanium-dioxide dielectric films prepared by vapor reaction
3. Oxide Films Formed on Titanium, Zirconium, and Their Alloys with Nickel, Copper, and Cobalt
4. Optical properties of thin films
5. Sputtered Titanium Oxide Films for Microcircuit Applications
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1. Chemical vapor deposition of TiO2 thin films from a new halogen-free precursor;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-11
2. Synthesis of rutile films activated by photon treatment;Inorganic Materials: Applied Research;2012-05
3. Investigation of New 2,5-Dimethylpyrrolyl Titanium Alkylamide and Alkoxide Complexes as Precursors for the Liquid Injection MOCVD of TiO2;Chemical Vapor Deposition;2010-03
4. TiO2 atomic layer deposition on ZrO2 particles using alternating exposures of TiCl4 and H2O;Applied Surface Science;2004-03
5. RF-assisted pulsed laser deposition of oxides;SPIE Proceedings;2002-08-09
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