Thermodynamic analysis of metalorganic vapor phase epitaxy of III–V alloy semiconductors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference32 articles.
1. Thermodynamic analysis for InGaAsP epitaxial growth by the chloride-CVD process
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4. Composition and doping control for metal–organic chemical vapor deposition of InP-based double heterojunction bipolar transistor with hybrid base structure consisting of GaAsSb contact and InGaAsSb graded layers;Japanese Journal of Applied Physics;2017-06-19
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