Silicon furnace components for microelectronic applications fabricated from shaped silicon tubes-Reference-Cited by-同舟云学术

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Silicon furnace components for microelectronic applications fabricated from shaped silicon tubes

Published:1990-07 Issue:1 Volume:104 Page:130-135
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Alioshin A.A.,Bletscan N.I.,Bogatyriov S.F.,Fedorenko V.N.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference8 articles.

1. The Preparation and Properties of CVD-Silicon Tubes and Boats for Semiconductor Device Technology

2. L.E. Berezenko, E.S. Falkevich et al., USSR Patent No. 687, 654 (1978).

3. D.H. Sawyer et al., USA Patent No. 4, 289, 572.

4. W. Keller et al., FRG Patent No. 1, 926, 500.

5. A.A. Alioshin, N.I. Bletscan et al., USSR Patent No. 1, 015, 692.

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1. Механика процессов получения кристаллических материалов;2023

2. Technology and Thermomechanics in Growing Tubular Silicon Single Crystals;Russian Microelectronics;2022-12

3. Technology and thermomechanics in growing tubular silicon single crystals;Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering;2022-09-28

4. The Possibility of Shape Stability in Capillary Crystal Growth and Practical Realization of Shaped Crystals;Crystal Growth Processes Based on Capillarity;2010-04-20

5. Shaped Crystal Growth;Springer Handbook of Crystal Growth;2010

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