Characterization of highly boron-doped Si, Si1 − xGex and Ge layers by high-resolution transmission electron microscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference13 articles.
1. A comparative study of heavy boron doping in silicon and Si1−x Gex layers grown by molecular beam epitaxy
2. Hole mobility measurements in heavily doped Si/sub 1-x/Ge/sub x/ strained layers
3. 91 GHz SiGe HBTs grown by MBE
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