Future of IC microtransducers-Reference-Cited by-同舟云学术

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Future of IC microtransducers

Published:1996-08 Issue:1-2 Volume:56 Page:179-192
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Baltes Henry

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference75 articles.

1. Large Scale Integrated Circuits Technology: State of the Art and Prospects,1982

2. Silicon microtransducers;Middelhoek;J. Phys. E: Sci. Instrum.,1981

3. CMOS as sensor technology;Baltes;Sensors and Actuators A,1993

4. IMEMS—integrated micro electro mechanical systems by VLSI and micromachining;Baltes,1994

5. Sensors in microsystems;Baltes,1995

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