Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors-Reference-Cited by-同舟云学术

Humidity-dependent mechanical properties of polyimide films and their use for IC-compatible humidity sensors

Published:1996-05 Issue:1-3 Volume:53 Page:330-334
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sager Karsten,Schroth Andreas,Nakladal Arne,Gerlach Gerald

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. A piezoresistive humidity sensor;Gerlach;Sensors and Actuators A,1994

2. Ein Feuchtesensor mit neuartigem Wirkprinzip;Sager,1993

3. The influence of relative ambient humidity on the characteristics of piezoresistive sensors;Sager,1994

4. Dynamic mechanical behaviour of polyimide;Bereir;J. Appl. Polymer Sci.,1968

5. Diffusion in Solids, Liquids, and Gases;Jost,1960

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