Fabrication of microdiaphragm pressure sensor utilizing micromachining-Reference-Cited by-同舟云学术

Fabrication of microdiaphragm pressure sensor utilizing micromachining

Published:1992-09 Issue:3 Volume:34 Page:217-224
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fujii Tetsuo,Gotoh Yoshitaka,Kuroyanagi Susumu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Micro-diaphragm pressure sensor;Sugiyama;Tech. Digest, IEDM '86, Los Angeles, CA, USA,1986

2. Laser-recrystallized piezoresistive micro-diaphragm sensor;Guckel;Tech. Digest, 3rd Int. Conf. Solid-State Sensors and Actuators, Philadelphia, PA, USA,7111985

3. Silicon fusion bonding for fabrication of sensors, actuators and microstructures;Barth;Sensors and Actuators,1990

4. Silicon on insulator (SOI) by bonding and etch-back;Lasky;IEDM 85, Washington, DC, USA,1985

5. Silicon-to-silicon direct bonding method;Shimbo;J. Appl. Phys.,1986

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