Author:
Odintzov M.A.,Sushentzov N.I.,Kudryavtzev T.L.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. A monolithic SAW physical electronic system for sensors;Velekoop;Proc. Ultrasonics Symp., Denver, CO, U.S.A.,14161987
2. Zero-temperature-coefficient SAW devices on AIN epitaxial films;Tsubouchi;IEEE Trans. Sonics Ultrason,1985
3. AlN thin films with controlled crystallographic orientations and their microstructure;Ohuchi;J. Vac. Sci. Technol.,1987
4. High coupling and high velocity SAW using a ZnO/AIN/ glass substrate;Shiosaki;Proc. Ultrasonics Symp., San Francisco, CA, U.S.A.,16181985
5. Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings;Thornton;J. Vac. Sci. Technol.,1974
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