Author:
Kühnel Wolfgang,Hess Gisela
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Technologie dünngeätzter Siliziumfolien im Hinblick auf monolithisch integrierbare Sensoren;Csepregi;BMFT Forschungsber. T,1983
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