Smart CMOS capacitive pressure transducer with on-chip calibration capability-Reference-Cited by-同舟云学术

Smart CMOS capacitive pressure transducer with on-chip calibration capability

Published:1992-07 Issue:1 Volume:34 Page:77-83
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Schnatz F.V.,Schöneberg U.,Brockherde W.,Kopystynski P.,Mehlhorn T.,Obermeier E.,Benzel H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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3. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects;Puers;Sensors and Actuators,1990

4. A new family of silicon capacitive pressure sensors;Kuisma;Proc. Sensor '88, Nürnberg, FRG,351988

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