Development of piezoelectric micromovement actuator fabrication using a thick-film double-paste printing method-Reference-Cited by-同舟云学术

Development of piezoelectric micromovement actuator fabrication using a thick-film double-paste printing method

Published:1994-05 Issue:1-3 Volume:43 Page:357-365
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Moilanen H.,Lappalainen J.,Leppävuori S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Fabrication of an adjustable Fabry-Perot interference filter using piezoelectric thick film low voltage multilayer actuators;Moilanen;Actuators 92, 3rd Int. Conf. New Actuators, Bremen, Germany,24261992

2. A piezoelectric bimorph actuator for swinging operation in high resolution CCD module;Tanuma;Proc. 4th Sensor Symp., Japan,1984

3. Fabrication of piezoelectric thick-film low-voltage multilayer actuators using a new double-paste printing technique;Moilanen;Sensors and Actuators A,1993

4. Compositional and structural behaviour of screen-printed PZT thick films during rapid sintering;Zhang;Abstr. IMF8, Maryland, USA,8131993

5. Multilayer piezoelectric actuators and their applications;Takahashi;Jpn. J. Appl. Phys.,1985

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