Solid state amorphization in metal/Si systems
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference121 articles.
1. Formation of an Amorphous Alloy by Solid-State Reaction of the Pure Polycrystalline Metals
2. Formation of an amorphous Rh‐Si alloy by interfacial reaction between amorphous Si and crystalline Rh thin films
3. Disordered intermixing at the platinum:silicon interface demonstrated by high‐resolution cross‐sectional transmission electron microscopy, Auger electron spectroscopy, and MeV ion channeling
4. Interactions of thin Ti films with Si, SiO2, Si3N4, and SiOxNyunder rapid thermal annealing
5. Effects of backsputtering and amorphous silicon capping layer on the formation of TiSi2in sputtered Ti films on (001)Si by rapid thermal annealing
Cited by 91 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Nanoscale effect on the formation of the amorphous Ni silicide by rapid thermal annealing from crystalline and pre-amorphized silicon;Acta Materialia;2024-01
2. Fabrication and characterization of germanium n-MOS and n-MOSFET with thermally oxidized yttrium gate insulator: Formation of underlying germanium oxide and its electrical characteristics;Materials Science in Semiconductor Processing;2023-08
3. Investigation of ultrathin yttrium silicide for NMOS source/drain contacts;Journal of Materials Science: Materials in Electronics;2023-05
4. Ultra-fast amorphization of crystalline alloys by ultrasonic vibrations;Journal of Materials Science & Technology;2023-04
5. Thermal stability issue of ultrathin Ti-based silicide for its application in prospective DRAM peripheral 3D FinFET transistors;Journal of Materials Science: Materials in Electronics;2021-08-28
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3